Rate My Professor Tsu-Jae King Liu

Tsu-Jae King Liu is a distinguished professor in Engineering at the University of California, Berkeley, holding the title of Distinguished Professor Emerita in Electrical Engineering and Computer Sciences. She received her B.S., M.S., and Ph.D. degrees in Electrical Engineering from Stanford University in 1984, 1986, and 1994, respectively. After completing her doctorate, she joined the Xerox Palo Alto Research Center as a Member of Research Staff, focusing on polycrystalline-silicon thin-film transistor technologies for flat-panel display and imaging applications. In August 1996, she became a faculty member in the Department of Electrical Engineering and Computer Sciences at UC Berkeley, where she progressed through numerous leadership roles, including Faculty Director of the Microfabrication Laboratory, Vice Chair for Graduate Matters, Associate Dean for Research in the College of Engineering, Chair of the Electrical Engineering Division and EECS Department, Vice Provost for Academic and Space Planning, and Dean of the College of Engineering from 2018 to 2025 as the Roy W. Carlson Professor of Engineering. She retired from her professorial duties in June 2025 and assumed the presidency of the National Academy of Engineering in July 2025.

King Liu's research specializes in advanced materials, fabrication processes, and devices for integrated circuits used in computing and memory, including nanometer-scale semiconductor devices, novel non-volatile memory, and M/NEMS technology for ultra-low-power integrated circuits. She co-developed the FinFET multigate transistor, now the standard in leading-edge computer chips, and contributed to tunneling field-effect transistors and nanoelectromechanical logic relays. Her scholarly output includes over 560 publications, such as the highly cited "FinFET-a self-aligned double-gate MOSFET scalable to 20 nm" (2000, 2541 citations) and "Tunneling field-effect transistors (TFETs) with subthreshold swing (SS) less than 60 mV/dec" (2007, 2264 citations), along with nearly 100 patents. Her contributions have earned prestigious honors, including the IEEE Founders Medal (2024), IEEE Kiyo Tomiyasu Award (2010), DARPA Significant Technical Achievement Award (2000), IEEE Electron Devices Society Education Award (2021), Chang-Lin Tien Leadership in Education Award (2020), election to the National Academy of Engineering (2017), and IEEE Fellowship (2007). She has also served as Editor-in-Chief of IEEE Electron Device Letters and on boards of directors for Intel Corporation and MaxLinear, Inc.