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"RIE Engineer"

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RIE Engineer

Staff

2026-05-15

Location

Cambridge

Harvard University

Type

Full-time

Required Qualifications

Bachelor’s in engineering + 3 years or 7 years experience
Cleanroom fabrication (ICP-RIE, PECVD, sputtering)
High vacuum systems, plasma etching
Problem-solving, teamwork, communication
Manual dexterity, basic machining

Research Areas

Nanofabrication
Dry etching (RIE, ICP)
Film deposition (CVD, PVD)
Cleanroom gases and safety
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RIE Engineer

RIE Engineer

Posting date: March 16, 2026

002504SR

  1. Job Type Full-time
  2. Location Cambridge
  3. School/Unit Harvard Faculty of Arts and Sciences
  4. Salary Grade 057
  5. Job Function Research
  6. FLSA Status Exempt
  7. Term Appointment No
  8. Union 65 - Harvard Academic Workers

Company Description

By working at Harvard University, you join a vibrant community that advances Harvard's world-changing mission in meaningful ways, inspires innovation and collaboration, and builds skills and expertise. We are dedicated to creating a diverse and welcoming environment where everyone can thrive.

Why join the Harvard Faculty of Arts and Sciences?

The Faculty of Arts and Sciences (FAS) is the historic heart of Harvard University. It is the home of Harvard’s undergraduate program (Harvard College, founded in 1636) as well as all of Harvard’s Ph.D. programs (the Harvard Kenneth C. Griffin Graduate School of Arts and Sciences, founded in 1872), Harvard Athletics and the Division of Continuing Education. The 40 academic departments and 30+ centers of the FAS support a community unparalleled in its academic excellence across the broadest range of liberal arts and sciences disciplines. Together, the FAS seeks to foster an environment of ambition, curiosity and shared commitment to knowledge and truth that elicits excellence from all members of our community and prepares the next generation of leaders through a transformative educational experience.

Job Description

Job Summary:

Independently provide professional engineering expertise in a core facility in process design, training, quality assurance, and developmental activities.

Job-Specific Responsibilities:

The CNS-nanofabrication facility (cleanroom) is the busiest lab in the field, and is supporting more than 1000 users (in FY2025) from > 300 internal and external research and industry groups. The dry etching (RIE) and film depositions (CVD and PVD) are the most critical processes in the nanofabrication and include more than 40 complex equipment, plus ancillary facilities and support more that 70-80% of users. The RIE Equipment Engineer is responsible for the equipment from RIE to other CVD areas and is the primary owner of more than 20 complex and heavily used tools, covering ICP-RIEs, PECVDs, sputtering deposition systems, and scrubbers.

This position assists with the evaluation and installation of new and advanced nanofabrication tools and related processes. Investigate and innovate new hardware configurations and functions of tools to meet the new process requirements for advanced research.   Assist researchers, faculty, and students regarding experimental design and use of equipment, instruments, systems, and facilities.

Manages all cleanroom gases (more than 15 toxic and non-toxic gases) activities and related facilities/tools for nanofabrication, including gas inventory of ordering and maintaining, daily gas supply and safety monitoring, gas cylinders and cabinets maintenance, toxic and nontoxic gas cylinder replacement, and new process gas investigation for new research applications.

Manages and maintains spare parts inventory and critical components for more than 50 nanofabrication process tools (dry etching, CVDs, PVDs), including pumps, chambers, RF generators, controllers, chillers, scrubbers, compressors, and other hardware.

Collaborates with staff and assists with the development of processes.

Trains users on best safety practices and assists in monitoring laboratory safety compliance. ERT team member, especially the key responder for toxic gas-related safety monitoring and handling.

Working Conditions:

  • May be required to work in a cleanroom, chemical, or measurement laboratory environment
  • May be exposed to toxic, radioactive, or carcinogenic materials, including compressed gases, acids, solvents, vacuum pump oils, and other chemicals
  • May be required to work nights and weekends
  • Mostly in the cleanroom, outside labs, and facility rooms. Office for interfacing users and vendor meetings, as well as paperwork.

Physical Requirements:

  • Lifting (up to approximately 50 pounds), bending, and other physical exertion
  • Standing and/or sitting for extended periods
  • Pushing, pulling, lifting, repetitive motion

Qualifications

Basic Qualifications:

  • Bachelor’s degree in an engineering or related field and a minimum of three years’ relevant work experience; or
  • A minimum of seven years of relevant work experience or equivalent combination of education and experience

Additional Qualifications and Skills:

  • Knowledge of Microsoft Office Suite, intermediate Excel skills.
  • Excellent written and oral communication skills are required.
  • Must possess excellent problem-solving skills.
  • Cleanroom experience and user-facility experience are highly desirable.
  • Cleanroom fabrication experience, especially in plasma etching (ICP, ECR, DRIE), film deposition, and high vacuum system highly desirable.
  • The candidate should be self-motivated with a strong desire to acquire on-the-job training, to succeed, and to develop intellectual and practical professional skills.
  • Demonstrated ability to work well in teams is essential.
  • This position will require manual dexterity with small and large parts and must be skilled to maintain and repair various vacuum, electronic, electrical, and mechanical systems.
  • Basic machining and mechanical design experience and working knowledge of electrical/electronic systems are also required.

Certificates and Licenses:

An active Massachusetts Journeyman Electrician license is desired. This will allow one to work on high voltage equipment.

Additional Information

  • Standard Hours/Schedule: 35 hours per week
  • Visa Sponsorship Information: Harvard University is unable to provide visa sponsorship for this position
  • Pre-Employment Screening: Identity, Education, Certification/License
  • Other Information:
    • All formal offers will be made by FAS Human Resources
    • We are first responders to any gas or chemical leaks. We are required to train and to maintain safe working environment for staff and users in the Fab.
    • Note: this position is included within the Harvard Academic Workers (HAW) union

#LI-KO1

Work Format Details

This position has been determined by school or unit leaders that all duties and responsibilities must be performed at a Harvard or Harvard-designated location. Certain visa types may limit work location. Individuals must meet work location sponsorship requirements prior to employment.

Salary Grade and Ranges

This position is salary grade level 057. Please visit Harvard's Salary Ranges  to view the corresponding salary range and related information.

Benefits

Harvard offers a comprehensive benefits package that is designed to support a healthy work-life balance and your physical, mental and financial wellbeing. Because here, you are what matters. Our benefits include, but are not limited to:

  • Generous paid time off including parental leave
  • Medical, dental, and vision health insurance coverage starting on day one
  • Retirement plans with university contributions
  • Wellbeing and mental health resources
  • Support for families and caregivers
  • Professional development opportunities including tuition assistance and reimbursement
  • Commuter benefits, discounts and campus perks

Learn more about these and additional benefits on our Benefits & Wellbeing Page.

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Frequently Asked Questions

🎓What are the basic qualifications for the RIE Engineer position at Harvard?

Candidates need a Bachelor’s degree in engineering or related field plus three years’ relevant experience, or seven years of experience. Preferred: cleanroom experience, plasma etching (ICP, ECR, DRIE), film deposition, high vacuum systems. Excellent problem-solving, communication, and teamwork skills required. See research jobs for similar roles.

🔧What are the main responsibilities of the RIE Engineer?

Manage 20+ RIE, ICP-RIE, PECVD, sputtering tools in the CNS nanofabrication cleanroom. Handle cleanroom gases (15+ types), spare parts inventory, tool installation, process development. Train users, ensure safety compliance, respond to gas leaks as ERT member. Explore new hardware for advanced research.

🌍Is visa sponsorship available for this RIE Engineer role?

No, Harvard University cannot provide visa sponsorship for this position. Candidates must meet work authorization requirements. Check higher ed jobs for US-based opportunities.

🏭What is the work environment and physical demands?

Primarily in cleanroom, labs, facility rooms; occasional office. Exposed to toxic gases, chemicals, acids. Requires lifting up to 50 lbs, bending, standing, repetitive motion. Nights/weekends possible. First responder for gas/chemical leaks.

💼What benefits does Harvard offer for this position?

Comprehensive package: generous PTO, medical/dental/vision from day one, retirement contributions, wellbeing resources, tuition assistance, commuter perks. Salary Grade 057; view ranges at Harvard HR. Union: Harvard Academic Workers. Learn more via research role advice.

🔬How does this role support research at Harvard's nanofabrication facility?

Supports 1000+ users from 300+ groups with critical dry etching (RIE) and deposition processes (70-80% usage). Innovate tools/processes for advanced nanofab research. Collaborate on experimental design. Explore research jobs at top universities.
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